GaN growth by MBE using a plasma RF source of nitrogen


William J. Schaff, Tyler Eustis, Michael Murphy, William Davis, Albert Heidt, Lester F. Eastman

School of Electrical Engineering

Cornell University Ithaca, NY 14853

Abstract


The development of devices made from GaN requires greater control of the materials synthesis than presently exists. A central difficulty is the lack of an ideal substrate for epitaxial growth. Most of the effort reported here has focused on the growth of GaN on sapphire substrates by gas source molecular beam epitaxy (GSMBE). This information is reported in sufficient detail to permit those entering the field to benefit from our experience. Your feedback is encouraged. We would like to incorporate any information that you wish to share into these pages.

Outline

  • Background
  • Growth of GaN
  • Remote RF plasma source of atomic N
  • Sapphire substrate mounting
  • Reflection high energy electron diffraction
  • Atomic Force Microscopy
  • X-ray diffraction
  • Hall measurements
  • Photoluminescence
  • Growth of AlGaN
  • AlGaN photoluminescence
  • Growth of cubic GaN
  • X-ray of cubic GaN
  • Summary
  • Linked Pages